Method and Structure for FinFET Devices

ABSTRACT

A semiconductor device and a method of forming the same are disclosed. The method includes receiving a semiconductor substrate and a fin extending from the semiconductor substrate; forming multiple dielectric layers conformally covering the fin, the multiple dielectric layers including a first charged dielectric layer having net fixed first-type charges and a second charged dielectric layer having net fixed second-type charges, the second-type charges being opposite to the first-type charges, the first-type charges having a first sheet density and the second-type charges having a second sheet density, the first charged dielectric layer being interposed between the fin and the second charged dielectric layer; patterning the multiple dielectric layers, thereby exposing a first portion of the fin, wherein a second portion of the fin is surrounded by at least a portion of the first charged dielectric layer; and forming a gate structure engaging the first portion of the fin.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs. Such scaling down has also increased the complexity ofprocessing and manufacturing ICs.

For example, field effect transistors (FETs) such as fin field effecttransistors (FinFETs) have been developed for their high drive currentswith small footprints compared to traditional planar FETs. In onemethod, FinFETs are formed on bulk substrate for reduced manufacturingcost. However, typical bulk FinFETs suffer a punch-through issue whereleakage currents may flow in a region not controlled by a gate. Toovercome the punch-through issue, conventional methods implant dopantimpurities into regions between the fin channel and the bulk substrate.Thermal treatments in subsequent process steps may cause diffusion ofthe implanted dopant impurities. These methods unavoidably introducedopant impurities into the whole fin, adversely reducing the carriermobility thereof. In addition, dopant impurity implantation may alsoadversely affect channel strain of the fin. Therefore, althoughconventional punch-through mitigating methods have been generallyadequate for their intended purposes, they are not satisfactory in allrespects.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the dimensions of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIGS. 1A, 1B, and 1C illustrate cross-sectional views of a semiconductordevice, in accordance with some embodiments.

FIG. 2 shows a flow chart of a method of fabricating semiconductordevices, according to various aspects of the present disclosure.

FIGS. 3A, 3B, 3C, 3D, 3E, 3F, 3G, and 3H are cross sectional views offorming a semiconductor device according to the method of FIG. 2, inaccordance with some embodiments.

FIG. 4 shows a flow chart of another method of fabricating asemiconductor device, according to various aspects of the presentdisclosure.

FIGS. 5A, 5B, 5C, 5D, 5E, and 5F are cross sectional views of forming asemiconductor device according to the method of FIG. 4, in accordancewith some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The present disclosure is generally related to semiconductor devices,and more particularly to semiconductor devices having field effecttransistors (FETs) such as fin field effect transistors (FinFETs). It isan objective of the present disclosure to provide methods for andstructures of semiconductor devices that effectively overcomepunch-through issues in FETs while providing excellent carrier mobilityand high short channel effect control.

FIGS. 1A, 1B, and 1C show cross-sectional views of different embodimentsof a semiconductor device 100 (e.g., the devices 100 a, 100 b, and 100c) constructed according to various aspects of the present disclosure.As will be shown, the device 100 illustrates an n-type FinFET and ap-type FinFET in one region of a substrate. This is provided forsimplification and ease of understanding and does not necessarily limitthe embodiment to any number of devices, any number of regions, or anyconfigurations of regions. Furthermore, the FinFET device 100 may be anintermediate device fabricated during processing of an integratedcircuit (IC), or a portion thereof, that may comprise static randomaccess memory (SRAM) and/or other logic circuits, passive componentssuch as resistors, capacitors, and inductors, and active components suchas p-type FETs, n-type FETs, double gate FETs, tri-gate FETs, FinFETs,metal-oxide semiconductor field effect transistors (MOSFET),complementary metal-oxide semiconductor (CMOS) transistors, bipolartransistors, high voltage transistors, high frequency transistors, othermemory cells, and combinations thereof.

Referring to FIG. 1A, the device 100 a includes a substrate 102 and anisolation structure 106 over the substrate 102. In the presentembodiment, the device 100 a includes an n-type FinFET 120 a and ap-type FinFET 120 b formed over the substrate 102. The FinFETs 120 a and120 b have similar structures and will be described collectively below.The FinFET 120 a (120 b) includes a fin 104 a (104 b) projecting fromthe substrate 102 upwardly through the isolation structure 106. TheFinFET 120 a (120 b) further includes a gate structure 110 a (110 b)over the isolation structure 106 and engaging the fin 104 a (104 b) onthree sides thereof (top surface and sidewalls). In some embodiments,the gate structure 110 a (110 b) may engage the respective fins on onlytwo sides, e.g., only the sidewalls of the fins. The FinFET 120 a (120b) further includes a dielectric layer 108 a (108 b) with net fixedcharges between the fin 104 a (104 b) and the isolation structure 106.The various elements of the device 100 a will be further described inthe following sections.

The substrate 102 is a silicon substrate in the present embodiment.Alternatively, the substrate 102 may comprise another elementarysemiconductor, such as germanium; a compound semiconductor includingsilicon carbide, gallium arsenic, gallium phosphide, indium phosphide,indium arsenide, and/or indium antimonide; an alloy semiconductorincluding SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; orcombinations thereof.

The isolation structure 106 may be formed of silicon oxide,fluoride-doped silicate glass (FSG), a low-k dielectric material, and/orother suitable insulating material. The isolation structure 106 may beshallow trench isolation (STI) features. Other isolation structures arepossible. The isolation structure 106 may include a multi-layerstructure, for example, having one or more thermal oxide liner layers.

In various embodiments, each of the gate structure 110 a and 110 bincludes a gate stack. Each gate stack may include a dielectric layerand a gate electrode layer on the gate dielectric layer. The gatedielectric layer includes a dielectric material, such as silicon oxide,germanium oxide, high k dielectric material layer or a combinationthereof. In another embodiment, the gate dielectric layer includes aninterfacial layer (such as a silicon oxide or germanium oxide layer) anda high k dielectric material layer on the interfacial layer. The gateelectrode layer includes a conductive material layer, such as dopedpolycrystalline silicon (polysilicon), metal, metal alloy orcombinations thereof. The gate stack may be formed by a procedure thatincludes forming a gate dielectric layer, forming a gate electrode layeron the gate dielectric layer, and patterning the gate electrode layerand the gate dielectric layer. The formation of the gate stack mayfurther include a gate replacement procedure to replace the previouslyformed gate stack with high k dielectric and metal. The gate replacementmay include a gate last operation or a high k last operation where bothgate dielectric and gate electrode are replaced at a later fabricationstage. Various other embodiments of the gate stacks are possible. Eachof the gate structure 110 a and 110 b may also include gate spacersformed on sidewalls of the gate stack by a procedure that includesdeposition and anisotropic etch.

The gate structure 110 a (110 b) engages a portion of the fin 104 a (104b) above the isolation structure 106, which defines a channel regionunderlying the gate structure 110 a (110 b). In an exemplary mode ofoperation of the FinFET 120 a (120 b), currents may flow between twosource/drain regions (not shown) through the channel region under thecontrol of the gate structure 110 a (110 b) by applying a voltagethereto.

In the present embodiment, the fins 104 a and 104 b are formed through avariety of processes including photolithography and etching. The fin 104a (104 b) is divided into at least two vertical portions (or sections),one above the isolation structure 106 and another one surrounded by thedielectric layer 108 a (108 b) and the isolation structure 106. Invarious embodiments, only the fin portions above the isolation structure106 are under the direct control of the respective gate structures 110 aand 110 b. The lower portion of the fins surrounded by the isolationstructure 106 and a portion of the substrate 102 thereunder are notunder the direct control of the gate structures 110 a and 110 b, whichdefines sub-fin regions of the respective FinFETs. In a conventionalFinFET, currents might flow in sub-fin regions not under the directcontrol of a gate, causing punch-through. This is undesirable. TheFinFETs 120 a and 120 b overcome such issue.

Still referring to FIG. 1A, the dielectric layer 108 a (108 b) islocated between the isolation structure 106 and the fin 104 a (104 b).The dielectric layer 108 a (108 b) is conformal to the profile of thefin 104 a (104 b), therefore also referred to as the liner film 108 a(108 b). The liner film 108 a (108 b) includes net fixed charges. In thepresent embodiment, the FinFET 120 a is an n-type FinFET with a p-typedoped channel region and the liner film 108 a includes net negativefixed charges. The sheet charge carrier density in the liner film 108 ais sufficiently high so as to repel the flowing of electrons into thesub-fin regions, thereby stopping punch-through currents between thesub-fin regions. To further this embodiment, the liner film 108 a is analuminum oxide (AlOx) dielectric layer with a presence of negative fixedcharge sheet density of about 2×10¹¹/cm² to about 1×10¹³/cm². In variousembodiments, the liner film 108 a has a thickness of about 1 nm to about5 nm.

In the present embodiment, the FinFET 120 b is a p-type FinFET with ann-type doped channel region and the liner film 108 b includes netpositive fixed charges. The sheet charge carrier density in the linerfilm 108 b is sufficiently high so as to repel the flowing of holes intothe sub-fin regions, thereby stopping punch-through currents between thesub-fin regions. To further this embodiment, the liner film 108 b is asilicon nitride (SiN_(x)) dielectric layer with a presence of positivefixed charge sheet density of about 2×10¹¹/cm² to about 1×10¹³/cm². Theliner film 108 b has a thickness of about 1 nm to about 5 nm. In variousembodiments, the sheet charge carrier densities in the liner films 108 aand 108 b are different. For example, the liner film with positive fixedcharges has less sheet charge carrier density than the liner film withnegative fixed charges, or vice versa, as will be described further indetails later.

FIGS. 1B and 1C illustrate cross-sectional views of the semiconductordevice 100 in some other embodiments. These other embodiments aresimilar to the semiconductor device 100 a. Therefore, reference numeralsfor the device 100 a are repeated to show the same or similar featuresin the devices 100 b and 100 c, respectively. Furthermore, somedescriptions of the same or similar features are abbreviated or omittedby referring to the descriptions of the device 100 a for the sake ofsimplicity.

As shown in FIG. 1B, the liner film 108 b extends to the FinFET 120 aand covers the liner film 108 a. In the present embodiment, the FinFET120 a is an n-type FinFET with a p-type doped channel region and theliner film 108 a includes net negative fixed charges, while the FinFET120 b is a p-type FinFET with an n-type doped channel region and theliner film 108 b includes net positive fixed charges. The liner film 108a has a sufficiently higher sheet charge carrier density than the linerfilm 108 b. As a result, the liner films 108 a and 108 b considered as awhole still appear carrying net negative fixed charges in the sub-finregion of the FinFET 120 a, which is still sufficiently high so as torepel the flowing of electrons into the sub-fin regions. To further thisembodiment, the liner film 108 a is an aluminum oxide (AlO_(x)) film andthe liner film 108 b is a silicon nitride (SiN_(x)) film. Therefore, thebottom portion of the fin 104 a is surrounded by an aluminum oxide film,a silicon nitride film, and the isolation structure 106, in a sequenceaway from the fin 104 a. In other embodiments, the FinFET 120 a is ap-type FinFET and the liner film 108 a includes net positive fixedcharges, while the FinFET 120 b is an n-type FinFET and the liner film108 b includes net negative fixed charges. In such scenario, thedielectric layer 108 a has a sufficiently higher sheet charge carrierdensity than the dielectric layer 108 b to allow the dielectric layers108 a and 108 b considered as a whole still appear carrying net positivefixed charges in sub-fin regions of the FinFET 120 a, so as to repel theflowing of holes into the sub-fin regions. In furtherance of otherembodiments, the bottom portion of the fin 104 a is surrounded by asilicon nitride film, an aluminum oxide film, and an STI feature, in asequence away from the fin 104 a.

As shown in FIG. 1C, the bottom portion of the fin 104 a is surroundedby the liner films 108 a and 108 b, and a dielectric spacer layer 108 clocated between the liner films 108 a and 108 b. The liner film 108 bincludes net fixed charges opposite to the fixed charges in the linerfilm 108 a. The dielectric spacer layer 108 c itself does not have netfixed charges, considered as electric neutral. The dielectric spacerlayer 108 c functions as a spacer to enlarge the distance between theliner film 108 b and the fin 104 a, weakening the electric fieldstrength inside the sub-fin regions of the fin 104 a from the net fixedcharges of the liner film 108 b. Therefore, even the sheet chargecarrier density of the liner film 108 a may not be much higher than theliner film 108 b, or even equivalent or slightly less, the combinedelectric fields inside the sub-fin regions of the fin 104 a from theliner films 108 a and 108 b still appear as the same type as thestand-alone electric field from the liner film 108 a, so as to repel theflowing of charges into the sub-fin regions. The dielectric spacer layer108 c is conformal to the liner film 108 a and also refers to as thespacer film 108 c. The spacer film 108 c may include silicon oxynitride(SiON), silicon carbide nitride (SiCN), silicon oxide carbide nitride(SiOCN), or a combination thereof. The spacer film 108 c may have athickness of about 0.5 nm to about 2 nm. In some embodiments, with theextra thickness from the spacer film 108 c, the stack of the liner film108 a and spacer film 108 c is thicker than the liner film 108 b. In thepresent embodiment, the FinFET 120 a is an n-type FinFET and the linerfilm 108 a includes net negative fixed charges, while the FinFET 120 bis a p-type FinFET and the liner film 108 b includes net positive fixedcharges. To further this embodiment, the liner film 108 a is an aluminumoxide film, the liner film 108 b is a silicon nitride film, and thespacer film 108 c is a silicon oxynitride film. Therefore, the bottomportion of the fin 104 a is surrounded by an aluminum oxide film, asilicon oxynitride film, a silicon nitride film, and the isolationstructure 106, in a sequence away from the fin 104 a. In otherembodiments, the FinFET 120 a is a p-type FinFET and the liner film 108a includes net positive fixed charges, while the FinFET 120 b is ann-type FinFET and the liner film 108 b includes net negative fixedcharges. In furtherance of other embodiments, the bottom portion of thefin 104 a is surrounded by a silicon nitride film, a silicon oxynitridefilm, an aluminum oxide film, and an STI feature, in a sequence awayfrom the fin 104 a.

In various embodiments of devices 100 a, 100 b, 100 c, and 100 d, thefins 104 a and 104 b are substantially free of the dopant impurities. Asa result, the carrier mobility and the proper channel stress (eithercompressive or tensile) in the respective fin portions areadvantageously maintained. This greatly enhances the electricalperformance of the FinFETs 120 a and 120 b. A method of forming thedevice 100 will now be described below with reference to FIG. 2, inconjunction with FIGS. 3A-3H that illustrate cross-sectional views ofthe semiconductor device 100 at various stages of the manufacturing.

Referring now to FIG. 2, a flowchart of a method 200 is illustratedaccording to various aspects of the present disclosure in forming asemiconductor device, such as the semiconductor device 100 of FIGS. 1Aand 1B. The method 200 is merely an example, and is not intended tolimit the present disclosure beyond what is explicitly recited in theclaims. Additional operations can be provided before, during, and afterthe method 200, and some operations described can be replaced,eliminated, or moved around for additional embodiments of the method.

At operation 202, the method 200 (FIG. 2) receives a substrate 102 withvarious structures formed therein and/or thereon. Referring to FIG. 3A,the device 100 includes a substrate 102 having two fins 104 a and 104 bprojecting upwardly from the substrate 102. The two fins 104 a and 104 bare in two regions of the device 100 where two FinFETs 120 a and 120 bare going to form. In an embodiment, the two fins 104 a and 104 b arefabricated using suitable processes including photolithography andetching processes. The photolithography process may include forming aphotoresist (or resist) layer overlying the substrate 102, exposing theresist to a pattern, performing post-exposure bake processes, anddeveloping the resist to form a resist pattern. The resist pattern isthen used for etching a hard mask layer to form patterned hard masks.Subsequently, the substrate 102 is etched using the patterned hard masksas an etch mask, leaving the fins 104 a and 104 b on the substrate 102.The fins 104 a and 104 b can also be fabricated by advancedpitch-splitting techniques such as side-wall image transfer or doublesidewall image transfer to achieve high pattern density. The variousetching processes can include dry etching, wet etching, reactive ionetching (RIE), and/or other suitable processes.

At operation 204, the method 200 (FIG. 2) forms a dielectric layer (orliner film) 108 a having net fixed charges. Still referring to FIG. 3A,the liner film 108 a is conformally deposited on the device 100 as ablanket material layer, overlying the top surface of the substrate 102,and the sidewalls and the top surfaces of the fins 104 a and 104 b. Inan embodiment, the FinFET 120 a is a p-type FinFET and the liner film108 a includes net positive fixed charges. In the present embodiment,the FinFET 120 a is an n-type FinFET and the liner film 108 a is analuminum oxide layer containing negative fixed charges. In oneembodiment, the aluminum oxide layer is deposited using atomic layerdeposition (ALD), chemical vapor deposition (CVD) or other suitablemethods and may have a thickness about few nanometers (e.g., rangingfrom about 1 nm to about 5 nm). In an example of employing ALD method,trimethylaluminum (Al(CH₃)₃) was used as the aluminum precursor in thefirst half cycle of the ALD process. During the second half cycle,either H₂O or O₂ plasma was used. The films were deposited usingsubstrate temperatures ranging from about 50 degree Celsius to about 400degree Celsius under operating pressure from about 100 mTorr to about300 mTorr. In another embodiment, aluminum oxide layer is deposited by aplasma-enhanced chemical vapor deposition (PECVD) process. The PECVDprocess employed a continuous O₂/Ar plasma and trimethylaluminum as thealuminum precursor using deposition temperature ranging from about 50degree Celsius to about 300 degree Celsius. Unlike ALD method, thedeposition rate for PECVD scales with the trimethylaluminum flowintroduced into the reactor. An annealing may follow the PECVD process,for example, in N₂ for 10 minutes at about 400 degree Celsius.

During the deposition of the aluminum oxide layer, ionized point defectsin the aluminum oxide bulk provide the negatively charged traps.Aluminum and oxygen vacancies, interstitials, and dangling bondsintroduce acceptor-like defect levels. Defects can trap electrons indeep acceptor-like levels near the AlO_(x) valence band and thus act asfixed negative charge centers. In addition, the negatively chargedtetrahedral AlO₄ may also have contribution to fixed negative charges.Deposition conditions and film thickness are designed and tuned toachieve expected sheet charge carrier density. In some embodiments, theliner film 108 a has a sheet charge carrier density of about 2×10¹¹/cm²to 1×10¹³/cm². In various embodiments, the liner film 108 a has athickness of about 1 nm to about 5 nm.

At operation 206, the method 200 (FIG. 2) removes a portion of the linerfilm 108 a to expose the fin 104 b (FIG. 3B). In some embodiments, afterthe blanket material layer 108 a is formed, an etching process isperformed to partially remove the blanket material from the sidewallsand top surface of the fin 104 b. The blanket material covers the fin104 a substantially remains. The liner film 108 a exhibits etchselectivity to the fin 104 b due to the different material composition.In embodiments, the operation 206 uses an etching process with anetchant to selectively remove the liner film 108 a while withoutsubstantially etching the fin 104 b. The etching processes may includeone or more dry etching processes, wet etching processes, and othersuitable etching techniques.

At operation 208, the method 200 (FIG. 2) forms a dielectric layer 104 bhaving net fix charges opposite to the fix charges in the dielectriclayer 108 a. Referring to FIG. 3C, the liner film 108 b is conformallydeposited on the device 100 as a blanket material layer, overlying theliner film 108 a in the FinFET 120 a region, and sidewalls and topsurface of the fin 104 b in the FinFET 120 b region. In an embodiment,the FinFET 120 b is an n-type FinFET and the liner film 109 b includesnet negative fixed charges. In the present embodiment, the FinFET 120 bis a p-type FinFET and the liner film 108 b is a silicon nitride layercontaining positive fixed charges. For example, the silicon nitridelayer may be deposited using atmospheric pressure chemical vapordeposition (APCVD), PECVD, ALD, or other suitable methods, and may havea thickness about few nanometers (e.g., ranging from about 1 nm to about5 nm). In one embodiment, the silicon nitride layer is deposited by aPECVD process. The deposition power is in a range of about 5 W to about30 W, temperature in a range of about 300 degree Celsius to 900 degreeCelsius, under pressure in a range of about 500 mTorr to 1200 mTorr.Silane (SiH₄, 10% in Ar) and ammonia (NH₃) were used as the processgasses and the ratio of gasses can be adjusted as a process parameter totune net positive fixed charge concentration. In an example, NH₃/SiH₄gas flow rate are in a range of about 30/300 sccm to about 100/30 sccm.In another embodiment, the silicon nitride layer is deposited by an ALDprocess using chlorosilane as the silicon source and ammonia as thenitrogen source. The deposition temperature is within a range from about300 degree Celsius to about 600 degree Celsius. The fixed positivecharges arise from silicon dangling bond with three nitrogen atoms(+Si≡N) within the silicon nitride, also known as K+ centers. In someembodiments, the liner film 108 b has a sheet charge carrier density ofabout 2×10¹¹/cm² to 1×10¹³/cm². Deposition conditions discussed aboveand post deposition treatments can adjust the sheet charge carrierdensity.

At operation 210, the method 200 (FIG. 2) removes a portion of the linerfilm 108 b to expose the liner film 108 a (FIG. 3D). The liner film 108a exhibits etch selectivity to the liner film 108 b due to the differentmaterial composition. In embodiments, the operation 210 uses an etchingprocess with an etchant to selectively remove the liner film 108 b whilesubstantially remain the liner film 108 a. The operation 210 may use adry etching, a wet etching, or other suitable etching processes. Forexample, a dry etching process may implement an oxygen-containing gas, afluorine-containing gas (e.g., CF₄, SF₆, CH₂F₂, CHF₃, and/or C₂F₆), achlorine-containing gas (e.g., Cl₂, CHCl₃, CCl₄, and/or BCl₃), abromine-containing gas (e.g., HBr and/or CHBR₃), an iodine-containinggas, other suitable gases and/or plasmas, and/or combinations thereof.For example, a wet etching process may comprise etching in dilutedhydrofluoric acid (DHF); potassium hydroxide (KOH) solution; ammonia; asolution containing hydrofluoric acid (HF), nitric acid (HNO₃), and/oracetic acid (CH₃COOH); or other suitable wet etchant. The operation 210is optional. In some embodiments, even though the charges in the twodifferent layers 108 a and 108 b are opposite, when the liner film 108 ahas a higher sheet charge carrier density than the liner film 108 b, thenet fixed charges on sidewalls of the fin 104 a still appear as the sameconductivity type as the liner film 108 a. If the net fixed chargedensity is sufficiently high so as to repel the flowing of charges intothe sub-fin regions, the operation 210 may be skipped, thereby themethod 200 may optionally proceeds to operation 212 from operation 208.

At operation 212, the method 200 (FIG. 2) form an isolation feature 106covering the device 100. For the sake of clarity, the device 100 afterthe operation 210 is denoted as the device 100 a (FIG. 3E), and thedevice 100 skipped the operation 210 is denoted as the device 100 b(FIG. 3F). The isolation feature 106 may be formed by depositing oxidecompound, fluoride-doped silicate glass (FSG), a low-k dielectricmaterial, and/or other suitable insulating material. The isolationstructure 106 may be shallow trench isolation (STI) features. After thedeposition of the isolation material, a polishing operation such as achemical mechanical planarization (CMP) process is performed to removeexcessive portion of the isolation feature 106, planarizing the topsurface of the device 100.

At operation 214, the method 200 (FIG. 2) recesses the isolation feature106 and liner films 108 a and 108 b to expose top portions of the fins104 a and 104 b, as shown in FIGS. 3G and 3H. As a result of theoperation 214, top portions of fins 104 a and 104 b project above theisolation feature 106, while bottom portions of fins 104 a and 104 b arestill surrounded by the charged liner films 108 a and 108 b and theisolation feature 106. The isolation feature 106 and liner films 108 aand 108 b can be recessed by etching in either a single step or inseparate etching steps, depending on the composition of the isolationfeature and the liner films. Any suitable etching technique may be usedto recess the isolation feature 106 and liner films 108 a and 108 b,including dry etching, wet etching, RIE, and/or other etching methods.Various etching parameters can be tuned for selective etching, such asetchant composition, etching temperature, etching solutionconcentration, etching time, etching pressure, source power, RF biasvoltage, RF bias power, etchant flow rate, other suitable etchingparameters, or combinations thereof.

At operation 216, the method 200 (FIG. 2) performs further processes tocomplete the fabrication of the FinFETs 120 a and 120 b. In anembodiment, operation 216 forms the gate structures 110 a and 110 b(FIGS. 1A and 1B) using either a “gate-first” or a “gate-last” process.Further, operation 216 may form epitaxial source/drain features in thesource/drain regions and may form an inter-layer dielectric (ILD) layerover the isolation structure 106, the fins 104 a and 104 b, and the gatestructures 110 a and 110 b. Further, operation 216 may form variousconductive features, such as contacts, vias, and interconnects, so as toconnect the FinFETs 120 a and 120 b to other portions of the device 100to form a complete integrated circuit.

FIG. 4 shows a flow chart of another method 400 according to variousaspects of the present disclosure in forming a semiconductor device,such as the semiconductor device 100 depicted in FIG. 1C. The method 400is similar to the method 200 in various operations. Therefore, referencenumerals for the operations in the method 200 are repeated to show thesame or similar operations in the device 400, such as operations 202,204, 208, 212, and 216. The method 400 is merely an example, and is notintended to limit the present disclosure beyond what is explicitlyrecited in the claims. Additional operations can be provided before,during, and after the method 400, and some operations described can bereplaced, eliminated, or moved around for additional embodiments of themethod. The method 400 is described below in conjunction with FIGS.5A-5F that illustrate cross-sectional views of the semiconductor device100 at various stages of the manufacturing. Furthermore, somedescriptions of the operations in the method 400 are abbreviated oromitted by referring to the descriptions of the method 200 for the sakeof simplicity.

At operation 202, the method 400 (FIG. 4) receives the device 100. Thedevice 100 includes a substrate 102 and two fins 104 a and 104 b. Thesefeatures are the same or similar to those in FIG. 3A. At operation 204,the method 400 (FIG. 4) conformally forms a liner film 104 a overlyingthe device 100, which has net fixed charges (FIG. 5A). Depending on thetypes of FinFET 120 a to form, the liner film 104 a can have positivefixed charges (e.g., a silicon nitride film) for a p-type FinFET or havenegative fixed charges (e.g., an aluminum oxide film) for an n-typeFinFET. In the present embodiment, FinFET 120 a is an n-type FinFET andthe liner film 108 a can be formed by depositing aluminum oxide in asuitable process, such as ALD or PECVD. In various embodiments, theliner film 108 a has a thickness of about 1 nm to about 5 nm.

At operation 205, the method 400 (FIG. 4) deposits a dielectric spacerlayer 108 c conformally over the device 100 as a blanket material layer(FIG. 5B). The dielectric spacer layer 108 c itself does not have netfixed charges, considered as electric neutral. The dielectric spacerlayer 108 c functions as a spacer to increase distance from the linerfilm 108 b to be formed above to the sub-fin regions, thereby weakeningthe electric filed strength from the fixed charges in the liner film 108b. The dielectric spacer layer 108 c also refers to as the spacer film108 c for simplicity. The spacer film 108 c may include siliconoxynitride (SiON), silicon carbide nitride (SiCN), silicon oxide carbidenitride (SiOCN), or a combination thereof. The spacer film 108 c may beformed by PECVD, ALD, or other suitable processes. The spacer film 108 cmay have a thickness of about 0.5 nm to about 2 nm.

At operation 206 a, the method 400 (FIG. 4) etch a portion of the linerfilm 108 a and the spacer film 108 c to expose the fin 104 b (FIG. 5C).The etching processes may include one or more dry etching processes, wetetching processes, and other suitable etching techniques.

At operation 208, the method 400 (FIG. 4) forms a liner film 108 bconformally overlying the device 100, which has net fix charges oppositeto the fix charges in the dielectric layer 108 a. As shown in FIG. 5D,the liner film 108 b is deposited on the device 100 as a blanketmaterial layer, covering the spacer film 108 c and the fin 104 b. In thepresent embodiment, the FinFET 120 b is a p-type FinFET and the linerfilm 108 b can be formed by depositing silicon nitride in a suitableprocess, such as ALD or PECVD. In various embodiments, the liner film108 b has a thickness of about 1 nm to about 5 nm. Even though the fixedcharges in the two different liner films 108 a and 108 b are opposite,the spacer film 108 c decreases the electric field strength in the fin104 a from the fixed charges in the liner film 108 b, so as the combinedelectric fields inside the fin 104 a still appear as the same type asthe stand-alone electric field from the liner film 108 a. In someembodiments, the liner film 108 a has a higher sheet charge carrierdensity than the liner film 108 b. In some embodiments, the liner film108 a can have an equivalent, or even slightly smaller, sheet chargecarrier density than the liner film 108 b, with the existence of thespacer film 108 c.

In some embodiments, the FinFET 120 a is a p-type FinFET and the FinFET120 b is an n-type FinFET. Accordingly, the liner films 108 a and 108 bincludes net fixed positive charges and net fixed negative charges,respectively. In furtherance of embodiments, the liner film 108 aincludes silicon nitride and the liner film 108 b includes aluminumoxide.

At operation 212, the method 400 (FIG. 4) form an isolation feature 106covering the device 100. For the sake of clarity, the device 100 withthe deposition of spacer film 108 c is denoted as the device 100c (FIG.5E). At operation 214 a, the method 400 (FIG. 4) recesses the isolationfeature 106, liner films 108 a and 108 b, and the spacer film 108 c, toexpose top portions of the fins 104 a and 104 b, as shown in FIG. 5F. Atoperation 216, the method 400 (FIG. 4) performs further processes tocomplete the fabrication of the FinFETs 120 a and 120 b for the device100 c.

Although not intended to be limiting, one or more embodiments of thepresent disclosure provide many benefits to a semiconductor device andthe formation thereof. For example, embodiments of the presentdisclosure provide structures of and methods for bulk FinFETs havingpunch-through stoppers underneath channel fins. The punch-throughstoppers are formed using fixed charges in dielectric liner films, whichpreserve purity in the channel fins. Specifically, negatively chargeddielectric liner film is used in n-type FET to repel electrons fromflowing in the sub-fin region, and positively charged dielectric linerfilm is used in p-type FET to repel holes from flowing in the sub-finregion. The fixed charge density in the dielectric liner films can beflexibly adjusted by tuning deposition conditions or conducting postdeposition treatments. Various embodiments of the present disclosure canbe implemented with low complexity and low manufacturing cost.

In one exemplary aspect, the present disclosure is directed to a method.The method includes receiving a semiconductor substrate and a finextending from the semiconductor substrate; forming multiple dielectriclayers conformally covering the fin, the multiple dielectric layersincluding a first charged dielectric layer having net fixed first-typecharges and a second charged dielectric layer having net fixedsecond-type charges, the second-type charges being opposite to thefirst-type charges, the first-type charges having a first sheet densityand the second-type charges having a second sheet density, the firstcharged dielectric layer being interposed between the fin and the secondcharged dielectric layer. The method further includes patterning themultiple dielectric layers, thereby exposing a first portion of the fin,wherein a second portion of the fin is surrounded by at least a portionof the first charged dielectric layer; and forming a gate structureengaging the first portion of the fin.

In another exemplary aspect, the present disclosure is directed to amethod of forming a semiconductor device. The method includes receivinga substrate including first and second fins extending from thesubstrate; depositing a first dielectric layer containing net first-typecharges, the first dielectric layer covering the first and second fins;and etching a portion of the first dielectric layer, thereby exposingthe second fin. The method further includes depositing a seconddielectric layer containing net second-type charges that are opposite tothe net first-type charges, the second dielectric layer covering thesecond fin; forming an isolation feature covering the first and seconddielectric layers; and recessing the isolation feature and the first andsecond dielectric layers, thereby uncovering a first portion of thefirst fin and a first portion of the second fin.

In another exemplary aspect, the present disclosure is directed to asemiconductor device. The semiconductor device includes a substrate; anisolation structure over the substrate; a first fin extending from thesubstrate, wherein a first portion of the first fin is above theisolation structure and a second portion of the first fin is surroundedby the isolation structure; and a first dielectric layer between theisolation structure and the second portion of the first fin, wherein thefirst dielectric layer contains fixed first-type charges. Thesemiconductor device further includes a second fin extending from thesubstrate, wherein a first portion of the second fin is above theisolation structure and a second portion of the second fin is surroundedby the isolation structure; and a second dielectric layer between theisolation structure and the second portion of the second fin, whereinthe second dielectric layer contains fixed second-type charges, whereinthe first-type charges are opposite to the second-type charges.

The foregoing outlines features of several embodiments so that those ofordinary skill in the art may better understand the aspects of thepresent disclosure. Those of ordinary skill in the art should appreciatethat they may readily use the present disclosure as a basis fordesigning or modifying other processes and structures for carrying outthe same purposes and/or achieving the same advantages of theembodiments introduced herein. Those of ordinary skill in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the present disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the present disclosure.

1. A method, comprising: receiving a semiconductor substrate and a finextending from the semiconductor substrate; forming multiple dielectriclayers conformally covering the fin, the multiple dielectric layersincluding a first charged dielectric layer having net fixed first-typecharges and a second charged dielectric layer having net fixedsecond-type charges, the second-type charges being opposite to thefirst-type charges, the first-type charges having a first sheet densityand the second-type charges having a second sheet density, the firstcharged dielectric layer being interposed between the fin and the secondcharged dielectric layer; patterning the multiple dielectric layers,thereby exposing a first portion of the fin, wherein a second portion ofthe fin is surrounded by at least a portion of the first chargeddielectric layer, and wherein the patterning of the multiple dielectriclayers includes completely removing the second charged dielectric layerfrom the fin; and forming a gate structure engaging the first portion ofthe fin.
 2. The method of claim 1, wherein: the first sheet density ishigher than the second sheet density; and the patterning of the multipledielectric layers further includes: forming an isolation featurecovering and in direct contact with the second charged dielectric layer;and recessing the isolation feature and the first and second chargeddielectric layers to expose the first portion of the fin.
 3. The methodof claim 1, wherein: the first sheet density is lower than the secondsheet density; and the patterning of the multiple dielectric layersfurther includes: forming an isolation feature covering and in directcontact with the first charged dielectric layer; and recessing theisolation feature and the first charged dielectric layer to expose thefirst portion of the fin.
 4. The method of claim 1, wherein: the firstportion of the fin provides a channel for an n-type field effecttransistor; the first-type charges are negative charges; and thesecond-type charges are positive charges.
 5. The method of claim 4,wherein the first charged dielectric layer contains aluminum oxide andthe second charged dielectric layer contains silicon nitride.
 6. Themethod of claim 4, wherein: the first sheet density is within a range of2×10¹¹/cm² to 1×10¹³/cm²; and the second sheet density is within a rangeof 2×10¹¹/cm² to 1×10¹³/cm². 7-9. (canceled)
 10. The method of claim 1,wherein the forming of the multiple dielectric layers includesperforming an atomic layer deposition (ALD) process.
 11. A method offorming a semiconductor device, comprising: receiving a substrateincluding first and second fins extending from the substrate; depositinga first dielectric layer containing net first-type charges, the firstdielectric layer covering the first and second fins; etching a portionof the first dielectric layer, thereby exposing the second fin;depositing a second dielectric layer containing net second-type chargesthat are opposite to the net first-type charges, the second dielectriclayer covering the first dielectric layer and the second fin; completelyremoving the second dielectric layer from the first fin, therebyexposing the first dielectric layer; forming an isolation featurecovering the first and second dielectric layers; and recessing theisolation feature and the first and second dielectric layers, therebyuncovering a first portion of the first fin and a first portion of thesecond fin.
 12. The method of claim 11, wherein the first dielectriclayer has a sheet charge carrier density higher than the seconddielectric layer.
 13. The method of claim 11, wherein: the first portionof the first fin provides a channel for an n-type field effecttransistor and the first-type charges are negative charges; and thefirst portion of the second fin provides a channel for a p-type fieldeffect transistor and the second-type charges are positive charges. 14.The method of claim 13, wherein: the first dielectric layer containsaluminum oxide; and the second dielectric layer contains siliconnitride.
 15. The method of claim 11, wherein the depositing of the firstand second dielectric layers is by atomic layer deposition (ALD). 16-20.(canceled)
 21. A method of forming a semiconductor device, comprising:receiving a structure having a substrate and first and second finsextending from the substrate, wherein the first fin is in a first regionand the second fin is in a second region; forming a first dielectriclayer conformally covering the first and second regions, wherein thefirst dielectric layer includes first-type charges; forming a spacerlayer conformally covering the first dielectric layer, wherein thespacer layer is electric neutral, and wherein the spacer layer containsa composition selected from silicon oxynitride, silicon carbide nitride,silicon oxide carbide nitride, and a combination thereof; removing thefirst dielectric layer from the second region; after the removing of thefirst dielectric layer from the second region, forming a seconddielectric layer conformally covering the first and second regions,wherein the second dielectric layer includes second-type charges,wherein the first-type charges are opposite to the second-type charges;forming an isolation feature covering the first and second regions; andrecessing the isolation feature and the first and second dielectriclayers, thereby uncovering an upper portion of the first fin and anupper portion of the second fin; and forming a first gate structureengaging the upper portion of the first fin and a second gate structureengaging the upper portion of the second fin.
 22. (canceled)
 23. Themethod of claim 21, wherein the removing of the first dielectric layerfrom the second region also includes removing the spacer layer from thesecond region.
 24. The method of claim 21, wherein the first dielectriclayer has a larger thickness than the second dielectric layer.
 25. Themethod of claim 21, wherein the isolation feature is a shallow trenchisolation (STI) feature.
 26. The method of claim 21, wherein the spacerlayer has a thickness ranging from about 0.5 nm to about 2 nm.
 27. Themethod of claim 21, wherein the first dielectric layer has a sheetcharge carrier density higher than the second dielectric layer.
 28. Themethod of claim 1, wherein: the first portion of the fin provides achannel for an p-type field effect transistor; the first-type chargesare positive charges; and the second-type charges are negative charges.29. The method of claim 28, wherein the first charged dielectric layercontains silicon nitride and the second charged dielectric layercontains aluminum oxide.